Product KCT with people and technology
Total 4 thing, 1 / 1 page
OHS Vehicle This system is a device that travels on top of a rail to carry cassette between Stocker and Stocker or Port (P & P)
OHCV Configuration This system is a subsidiary facility for operating Carriage (2-axis / 3-axis: Up, Down, Running) for carrying cassette between STK and STK or between STK and FTK
OHS MTL This facility is a facility where OHS Vehicle is used to transport OHS vehicles by lifting between upper rail and lower rail.