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Product

product
KCS3002 / 3004
model
300 Sorter
summary
This equipment supports FOUP / FOSB for transporting 300mm. Perform Wafer Dumping, Alignment and OCR Reading with Wafer Sorter Station

Wafer Size : 300mm Silicon Wafer

Carrier : 25 Wafers

Load Port Configuration : 300mm LPM(2~4Foup)

Wafer return: Clean Robot

FFU Module :

   -. Surface speed : 0.4m/sec

   -. Efficiency : 0.1㎛ 99.99995%

Aligner/OCR(Option)

   -. ID Reading&Notch Sort

CCD Camera & Ionizer