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Product

product
KCE 302 / KCE303 / KCE304
model
EFEM
summary
Moving Wafer by Moving Wafer from Carrier (FOUP or FOSB) to Loading Chamber for carrying out Wafer Arrangement by Using Carrying Robot

Wafer Size : 300mm Silicon Wafer

Carrier : 25 Wafers

Load Port Configuration :

   300mm LPM(3Foup)

Wafer 반송 : Clean Robot

FFU Module :

   → 면속 : 0.4m/sec

   → 효율 : 0.1㎛ 99.99995%